Techniki jonowe w inżynierii powierzchni

Abstract

In this work the basis of ion beam techniques used in surface engineering are presented. The main ion beam method applied to modify the properties of the materials surface and/or to form the coating on the surface are classified as ion beam surface modification, ion beam sputtering, ion beam mixing and dual beam ion beam assisted deposition. The advantages of ion beam techniques such as low residual stress and good or excellent adherence to the substrate are the results of an interaction between ions and atoms of the surface of substrate.